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RF versus DC for Generating Plasma


arainho_cl
 

Hi All,


Could some one eligthen me on the difference of using HV DC and RF for plasma generation. What are the pro and cons of each method.

Thanks,

Alfredo


 

Hi Alfredo,

In general, the both are just different methods to supply energy to ionize a gas and support the gas discharge - plasma. When you supply DC (it may be both high voltage and low voltage with external electrons emitter), electrons accelerate in electrical field to get energy which is necessary to ionize a gas molecule, when you supply RF, electrons are accelerated in RF (usually 13.56 MHz) field. There also may be MF (middle frequency, 40 - 100 kHz) plasma. The each method device design, pros and cons strongly depend on your application.

Best regards,

Vladimir Chutko, Ph.D.
VECOR
101 Duranzo Aisle, Irvine, CA92606, USA
Phone: +1-949-394-4466
Fax: +1-949-451-6813
info@...
www.vecorus.com

arainho_cl wrote:

Hi All,


Could some one eligthen me on the difference of using HV DC and RF for plasma generation. What are the pro and cons of each method.

Thanks,

Alfredo



------------------------------------

Yahoo! Groups Links





 

¿ªÔÆÌåÓý

That and costs, DC high voltage is usually cheaper to do than RF.....

On 19/08/2010 1:01 PM, Vladimir Chutko wrote:

?

Hi Alfredo,

In general, the both are just different methods to supply energy to
ionize a gas and support the gas discharge - plasma. When you supply DC
(it may be both high voltage and low voltage with external electrons
emitter), electrons accelerate in electrical field to get energy which
is necessary to ionize a gas molecule, when you supply RF, electrons are
accelerated in RF (usually 13.56 MHz) field. There also may be MF
(middle frequency, 40 - 100 kHz) plasma. The each method device design,
pros and cons strongly depend on your application.

Best regards,

Vladimir Chutko, Ph.D.
VECOR
101 Duranzo Aisle, Irvine, CA92606, USA
Phone: +1-949-394-4466
Fax: +1-949-451-6813
info@...


arainho_cl wrote:
> Hi All,
>
>
> Could some one eligthen me on the difference of using HV DC and RF for plasma generation. What are the pro and cons of each method.
>
> Thanks,
>
> Alfredo
>
>
>
> ------------------------------------
>
> Yahoo! Groups Links
>
>
>
>
>



Aurigema, Andrew N. (KSC-ASRC-474)[ASRC AEROSPACE]
 

¿ªÔÆÌåÓý

15 kv AC is a lot easier and cheaper to make.? There are endless 15kv ¡°beer sign¡± transformers out on Ebay for sale.? 15kv DC is just rectified AC so you get about the same thing only with the rectifier losses.?

?

From: VacuumX@... [mailto:VacuumX@...] On Behalf Of arainho_cl
Sent: Wednesday, August 18, 2010 10:11 PM
To: VacuumX@...
Subject: [VacuumX] RF versus DC for Generating Plasma

?

?

Hi All,

Could some one eligthen me on the difference of using HV DC and RF for plasma generation. What are the pro and cons of each method.

Thanks,

Alfredo


Gomez Addams
 

________________________________________
The most fundamental human right is ownership
of your own body. If you may not do with it
however you please, you are not yet free.


On Thu Aug 19 6:02 , 'Aurigema, Andrew N. (KSC-ASRC-474)[ASRC AEROSPACE]'
<andrew.n.aurigema@...> sent:

15 kv AC is a lot easier and cheaper to make.? There are endless
15kv ¡°beer sign¡± transformers out on Ebay for sale.? 15kv DC is just rectified
AC so you get about the same thing only with the rectifier losses.?
Er, something like that.

Full-wave rectified DC will be 1.414 X the RMS AV volts, so actually,
15kVDC = 21.2 kV before rectifier losses -- which with modern rectifiers,
may be much lower than you might expect. I've noticed that Vf is much lower
now than it was in the HV rectifiers of ten or twenty years ago.


From:
VacuumX@... [mailto:VacuumX@...] On Behalf Of arainho_cl
Sent: Wednesday, August 18, 2010 10:11 PM
To: VacuumX@...
Subject: [VacuumX] RF versus DC for Generating Plasma
Hi All,



Could some one eligthen me on the difference of using HV DC and RF for plasma
generation. What are the pro and cons of each method.