Kevin,
The CMOS transistor itself is made of standard P and N type silicon (with
various doping levels) along with Poly-Silicon for the gate and a bunch of
silicon dioxide for the gate dielectric.
Metal is still a very important issue in IC design. See my previous
comments on electromigration...
Are we talking about IC's or transistors. I have never heard of a CMOS
transistor, since the very idea of the C part is the coupling of two MOS
transistor of opposite polarity. I have not kept abreast of the bleeding
edge of solid state development, but either someone is confused or I
am even further behind than I thought.
Jim