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SiO coating with a tantalum box
Hey guys,?
It has been a long road but I finally have all the pieces of my SiO over-coater set up and running at once in the 1.5 meter chamber.? Commercial Tantalum box ( from Leskers ) with 280 amps x 4.8 vac flowing thru it, ? 2 each 500 amp amperage pass-thru's that don't get hot, a little electromechanical shutter vain thing with aluminum foil on it to cover the output of the emitter box it while it heats up,? XMS-1 crystal detector measuring the thickness ( old but working perfectly ).? Aluminum deposition process laying down shiny bright alunuinum.? Vacuum level ....... ummmm not sure but somewhere in the low 10^ -4 millitorr's. On my first full blast test I saw I saw a pathetic 0.1 nm / sec? accumulation rate for the 15 seconds it ran.? I had a melt down issue so had to cut it short.? The XMS-1 recorded 1.2 nm of material total.? Yea I know that is sad but that is what I got on the crystal before my amperage pass-thru started glowing red hot.? I now have 2 each 500 + amp pass-thru in parallel so that is not going to happen again.? I ran the emitter box for 20 seconds to get it cherry red ( with all the voltage and amperage it would take ) then opened the aluminum foil shutter to expose the mirror and test plates.? The mirror and witness plates showed no sign of over-coating protection for thier 15 seconds of exposure to the output.? The aluminum foil has a dull gray "something " on it that came from the side facing the emitter.? It don't look like aluminum to me.? I don't know what SiO film looks like.? It is blasted on the foil exactly in front of of the output from the tantalum box.? I have a chart of deposited SiO nm vs colors but not any examples of the colors to go by.? As you can see, my chamber has lots of colors in it already from me screwing up all kinds of things over the last few months. Now for the question :? Given that my tantalum box ( single 1/2" dia output hole ) is 24" back from my 9" dia mirror and glass plate targets,? how big a cone shaped distribution pattern can I expect to cover ??? ? I was planning on setting up the same way as you see in the picture attached so my crystal detector will be about 5" from the center of the blast zone. ? Can I expect to see SiO 5" out from the center ????? 10" out ???? 20" out ??? Any help would be appreciated.? Pictures of what SiO looks like when deposited would be very much appreciated.? Drew in sunny Florida ? |
Andrew, I can't tell from your picture but are you using a "baffle box" source? You can determine the distribution from the source by using a material that sublimes (doesn't melt and wet) such as chromium instead of the SiO. Don
Hey guys,?
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Donald M. Mattox Society of Vacuum Coaters 71 Pinon Hill Place NE Albuquerque, NM? 87122-1914 Telephone 505/856-7188 FAX 505/856-6716 E-mail donmattox@... WebSite? http://www.svc.org
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Don,
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Yes, I am using a double port baffle box that has a single 1/2" discharge port out the side.? The 1/2" hole is really a little 1/2" dia well about an inch deep.? The SiO gas would be coming out of that well.? Maybe you can compute the distribution from a sublimation source 24" away from target but I cant.? Could you give me the dummies version of how to do this ???? Or maybe help me thru it once. ?? Oh, I am about 4/5 thru your book.? Great read.? Got lots of questions on the plasma assisted deposition onto 3-D stuff but will chat with you offline on that.? If I had known how complex all this vacuum stuff was before I blundered into it I would have never bought that chamber.? I not smrt enough for this. ? Drew ---------------------------------------------------------------------------------? On Wed, Oct 26, 2011 at 4:14 PM, SVC <donmattox@...> wrote:
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