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Re: SiO coating with a tantalum box


 

Don,

Yes, I am using a double port baffle box that has a single 1/2" discharge port out the side.? The 1/2" hole is really a little 1/2" dia well about an inch deep.? The SiO gas would be coming out of that well.?

Maybe you can compute the distribution from a sublimation source 24" away from target but I cant.? Could you give me the dummies version of how to do this ???? Or maybe help me thru it once. ??

Oh, I am about 4/5 thru your book.? Great read.? Got lots of questions on the plasma assisted deposition onto 3-D stuff but will chat with you offline on that.? If I had known how complex all this vacuum stuff was before I blundered into it I would have never bought that chamber.? I not smrt enough for this. ?

Drew

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On Wed, Oct 26, 2011 at 4:14 PM, SVC <donmattox@...> wrote:
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Andrew,

I can't tell from your picture but are you using a "baffle box" source? You can determine the distribution from the source by using a material that sublimes (doesn't melt and wet) such as chromium instead of the SiO.

Don




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