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Re: Magnetron sputter system


 

Drew,

Your 3/4" feedthrough should handle 280 Amps without blinking and a single
00 cable should get you close, but three in parallel should do the trick.
Do you have a current meter available to see what you're actually putting
to the source? Any chance some of that juice is going to ground? Those
insulators are looking pretty shiney.

SiO runs about 50C below Al so you should be able to put a ton of it down
with your system. The trick is spitting (hence the baffle box). Setting up
an RF sputtering system would be more fun than a barrel full of monkeys,
and an excellent winter project (not that you're afflicted by things like
winter) but it seems like there's got to be an easier way. Maybe an array
of smaller baffle boxes (check RD Mathis in addition to Lesker). You can
use tungsten filaments with an alumina crucible and a Ta baffle on top.
Not sure if carbon wool will work or just condense the SiO.

If I were beating my head against that wall, I'd check the current, check
for grounds, and think about getting a smaller box to get a feel for the
source.

Dave

Dave,

I have a 280 amp resistive heater box ( Leskers ) that I have tried to
make
glow several times. It always ends after a few seconds with the wiring
getting very hot.

My 5kw welding transformer can put out the amps ( about 1000 amp at 5 vac
)
but I cant seem to get it thru the chamber wall without melting power
transfer cables. I have a 3/4 inch dia copper rod high amperage pass thru
( that came with the chamber ) and have 3 each 3/8" stranded copper wire
cables running from the pass thru to the little tantalum box. Only one
cable is shown in the picture but now there are 3 of them.

I just cant make that box glow red before the power cables do.

[image: Inline image 1]

So I am thinking of switching to plasma sputtering like the big boys do.

The big transformer works fine for driving the 36 emitters around the
chamber ( 4 at a time ) so laying down aluminum is no problem. It is
putting down the overcoat that I cant seem to get started on.

[image: Inline image 2]

So do you have any suggestions on how to make the tantalum box glow red or
where to get a plasma system cost effectively ???

Drew in sunny Florida



On Thu, Oct 30, 2014 at 4:27 PM, dgrove@... [VacuumX] <
VacuumX@...> wrote:

What issues are you having with the SiO that sputtering will fix? That's
a
pretty big leap from resistive sources to sputtering.

Dave



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