Andrew,
Obviously it's?contamination reacting with the plasma.?
Do you clean your whole chamber with acetone every run?? Try not to use silicon grease as it will capture contaminants and also migrate everywhere and collect more.? It's also very difficult to remove.??Finger
prints are also a source.? Using non powdered latex gloves can help.??
?
?
Gordon Anderson
Senior I&E Specialist
Project Services
?
?
Hovensa Disclaimer: This message and any attachment to it is intended only for the use of the individual or entity to whom it is addressed; it contains information that is proprietary and confidential, and may be privileged
and exempt from disclosure under applicable law. If the reader of this message is not the intended recipient or the employee or agent responsible for delivering the message to the intended recipient, you are hereby notified that any dissemination, distribution
or copying of this communication is strictly prohibited. IF YOU HAVE RECEIVED THIS COMMUNICATION IN ERROR, PLEASE: (A) DO NOT READ THIS E-MAIL MESSAGE, FORWARD IT TO ANY PERSON, SAVE IT, PRINT IT, OR OTHERWISE USE IT; (B) DELETE IT FROM YOUR COMPUTER SYSTEM;
AND (C) NOTIFY THE SENDER, BY RETURN E-MAIL, OF THE MISTAKEN TRANSMISSION.
.
