?

Hi Ken,

Who do you buy the crystals from?

Regards,

Alfredo

--- In VacuumX@..., "Aurigema, Andrew N. (KSC-ASRC-491)[ASRC AEROSPACE]" wrote:
>
> And your design worked great Ken. Used it about 8 times now and it don't miss a beat. I even cleaned the crystal with some mirror stripper and it still all worked.
>
> Thanks again for the help on the XMS.
>
> Drew in sunny FLA
>
> From: VacuumX@... [mailto:VacuumX@...] On Behalf Of Ken
> Sent: Friday, July 09, 2010 10:23 AM
> To: VacuumX@...
> Subject: [VacuumX] Re: Wanted - Deposition Crystal holder
>
>
>
> I have already disposed of my only crystal holders but there is a schematic of a very reliable and easily constructed Oscillator in the files section you can build.
>
> The circuit as shown is for the modified XMS controllers I sent out. You would need to change the circuit of the oscillator by removing the 1mh choke coil and hooking the lead from the top end of the choke to 12vdc from a wall-wart or other source of power.
>
> I made a few circuit boards for this but they are all with the XMS controllers now. Easy enough to breadboard on a small piece of perfboard. The transistors can be any NPN small signal transistor with gain at 10mhz such as the 2N2222A or equiv.
>
> Ken Hunter
>
> --- In VacuumX@..., "achronicity" wrote:
> >
> > Greetings,
> >
> > I am looking for some reasonably priced crystal holders and oscillators for a deposition controller. I see some good info in the files section on crystal holders and oscillators, and while I can machine housings and such pretty easily, I would prefer to just purchase something that already works. If anyone has working sensor heads or oscillators they would part with for a reasonable price, it would save me a lot of time and trial & error. I have been looking on Ebay for awhile now, and I can find the odd oscillator for $100.00 USD (pricey IMO) and I can find deposition crystals cheap, but I have yet to stumble upon any crystal holders.
> >
> > I recently picked up a nice Leybold IC6000 4 channel deposition controller and it will be arriving soon, so I want to come up with some sensors to try it out - any ideas?
> >
> > -Achro
> >
>

?

Hi Alfredo,

In general, the both are just different methods to supply energy to
ionize a gas and support the gas discharge - plasma. When you supply DC
(it may be both high voltage and low voltage with external electrons
emitter), electrons accelerate in electrical field to get energy which
is necessary to ionize a gas molecule, when you supply RF, electrons are
accelerated in RF (usually 13.56 MHz) field. There also may be MF
(middle frequency, 40 - 100 kHz) plasma. The each method device design,
pros and cons strongly depend on your application.

Best regards,

Vladimir Chutko, Ph.D.
VECOR
101 Duranzo Aisle, Irvine, CA92606, USA
Phone: +1-949-394-4466
Fax: +1-949-451-6813
info@...


arainho_cl wrote:
> Hi All,
>
>
> Could some one eligthen me on the difference of using HV DC and RF for plasma generation. What are the pro and cons of each method.
>
> Thanks,
>
> Alfredo
>
>
>
> ------------------------------------
>
> Yahoo! Groups Links
>
>
>
>
>

Hi All,


Could some one eligthen me on the difference of using HV DC and RF for plasma generation. What are the pro and cons of each method.

Thanks,

Alfredo



------------------------------------

Yahoo! Groups Links

And your design worked great Ken. Used it about 8 times now and it don't miss a beat. I even cleaned the crystal with some mirror stripper and it still all worked.

Thanks again for the help on the XMS.

Drew in sunny FLA

From: VacuumX@... [mailto:VacuumX@...] On Behalf Of Ken
Sent: Friday, July 09, 2010 10:23 AM
To: VacuumX@...
Subject: [VacuumX] Re: Wanted - Deposition Crystal holder



I have already disposed of my only crystal holders but there is a schematic of a very reliable and easily constructed Oscillator in the files section you can build.

The circuit as shown is for the modified XMS controllers I sent out. You would need to change the circuit of the oscillator by removing the 1mh choke coil and hooking the lead from the top end of the choke to 12vdc from a wall-wart or other source of power.

I made a few circuit boards for this but they are all with the XMS controllers now. Easy enough to breadboard on a small piece of perfboard. The transistors can be any NPN small signal transistor with gain at 10mhz such as the 2N2222A or equiv.

Ken Hunter

--- In VacuumX@...<mailto:VacuumX%40yahoogroups.com>, "achronicity" <achronicity@> wrote:

Greetings,

I am looking for some reasonably priced crystal holders and oscillators for a deposition controller. I see some good info in the files section on crystal holders and oscillators, and while I can machine housings and such pretty easily, I would prefer to just purchase something that already works. If anyone has working sensor heads or oscillators they would part with for a reasonable price, it would save me a lot of time and trial & error. I have been looking on Ebay for awhile now, and I can find the odd oscillator for $100.00 USD (pricey IMO) and I can find deposition crystals cheap, but I have yet to stumble upon any crystal holders.

I recently picked up a nice Leybold IC6000 4 channel deposition controller and it will be arriving soon, so I want to come up with some sensors to try it out - any ideas?

-Achro

Greetings,

I am looking for some reasonably priced crystal holders and oscillators for a deposition controller. I see some good info in the files section on crystal holders and oscillators, and while I can machine housings and such pretty easily, I would prefer to just purchase something that already works. If anyone has working sensor heads or oscillators they would part with for a reasonable price, it would save me a lot of time and trial & error. I have been looking on Ebay for awhile now, and I can find the odd oscillator for $100.00 USD (pricey IMO) and I can find deposition crystals cheap, but I have yet to stumble upon any crystal holders.

I recently picked up a nice Leybold IC6000 4 channel deposition controller and it will be arriving soon, so I want to come up with some sensors to try it out - any ideas?

-Achro

----- Original Message -----

From: James Blackett

To: VacuumX@...

Sent: Wednesday, June 23, 2010 4:45 PM

Subject: Re: [VacuumX] Pump manuals

?

All,

?

many thanks for your suggestions, I'll check through what you have said and get back to you with the results,

?

James

----- Original Message -----

From: SVC

To: VacuumX@yahoogroups.com

Sent: Wednesday, June 23, 2010 3:29 PM

Subject: Re: [VacuumX] Pump manuals

?

If you have a sight window look to see if the oil lever is up to the mark.? If it is that old I would drain and replace the oil.

Make sure the ballast valve is not fully open so you are not just pumping through the valve and not the system. I would start with the valve fully closed and then if you have trouble with water getting in your oil and making it froth up and lose pumping speed you can begin opening he valve is stages. It is best to let in dry air if it is available.

Don

Hi all,

?

I'm new to this group - looks like some of you have some fancy rigs I could only dream of. AnywayI've just dug out a very old Edwards single stage speedi-vac pump, model 1sc50, which has been on the shelf for many years. When I started it up, it did not produce hardly any vacuum ( only an absolute pressure of about 600 mbar, which is useless!!!). Before I start stripping it down, I was wondering if anyone had or could point? me towards a manual? This pump is probably?around 50 years old, but I remember it being refurbished by Edwards around 1975 and it hasn't been used since then.

?

many thanks in anticipation,

?

James

--

____________________________________
Donald M. Mattox
Society of Vacuum Coaters
71 Pinon Hill Place NE
Albuquerque, NM? 87122-1914

Telephone 505/856-7188
FAX 505/856-6716
E-mail donmattox@svc.org
WebSite? http://www.svc.org

Greetings,

I have not posted here in quite awhile, but have been building my own metalization system. Last night, I was finally able to do my first ever aluminum coating test runs. The results went way beyond my expectations. I built this small system to coat laser mirrors and other small parts. The various posts by people here were very helpful to me in developing my system.

My system consists of the following major components:

1) Edwards es200 roughing pump that was collecting dust for many years
2) MDC KMST-100-2 foreline trap(ebay)
3) 1 torr Barotron capacitance manometer rough vacuum sensor(ebay)
4) Leybold TMP150 turbomolecular pump (ebay)
5) 2 Edwards PV25PKA valves (ebay) for roughing pump isolation and Foreline
6) Veeco RG1002 Guage controller Bayard-Aplert Guage tube (ebay)
7) Leybold NT150 turbomoleculatr pump comtroller.
8) Custom 6 way 100ISO/NWF25 manifold - turned from aluminum on my lathe.
9) Eight inch Chamber - turned from aluminum on my lathe
10) Various NW25 and 100ISO fittings and adapters - turned from brass and aluminum on my lathe.
11) 2 STC 3 way Pneumatic valves to control the Edwards valves (ebay)
12) Eight inch Pyrex glass bowl for top of the chamber (Kmart)
13) various orings (online, Marco rubber)

With extensive scrounging and careful shopping I was able to put this system together for around $500.00 (US)

I used slow setting JB-weld epoxy to assemble flanges to manifolds, and feed-thru conductors to flanges. Various sources on the web indicate that this was a good cheap alternative to products like torr seal. It makes incredibly strong bonds to aluminum. I designed my epoxy joints to expose the minimum epoxy surface (annular ring) to the high vacuum. I was also careful to outgas the epoxy. To do this, I used a discarded pressure cooker as a chamber and my roughing pump to expand and remove any bubbles from the epoxy in the assembled joints. I needed to apply vacuum very slowly or the epoxy would explode out of the joints and make a mess.

My chamber now pumps down in a few minutes to 5X10-6 torr with the turbo pump. Ultimate vacuum is in the high-mid 10-7 torr range. The ultimate vacuum is very sensitive to foreline pressure. I need to warm up my single stage roughing pump well, and gas ballast it for awhile in order to get the needed rough vacuum in the range of 10-20 millitorr. I started my depositions when I reached 5X10-6 torr with the turbo.

My chamber being rather small, I used a single KJ Lesker basket emitter centered low in the chamber. This seems to be working well for now. I am using a rewound MOT and variac to hand-control the emitter power. I was very careful to baffle the throat of my turbo pump to prevent it from being in line of sight of the emitter.

For my first test run, I coated a microscope slide. I fixtured it couple of inches above the emitter. I slowly ramped the emitter voltage up to 50% rated and this melted the aluminum and coated the tungsten basket. I used a half gram or so of electrical wire for my source charge. Once this was melted, I ramped power up to 100% rated (4.65 volts for my basket source), and after a couple of seconds *poof* and I had a coating. The microscope slide went silvery/opaque, and everything in line of sight of the emitter, such as areas of my chamber bowl, acquired a silvery coating. I then turned off power to the emitter. This was very encouraging. When I examined the results, I had a beautiful shiny coating exactly where I wanted it. There were some minor pits and streaks, but I was not especially careful with cleaning the slide, so I expected this.


Next, I tried a prototype plastic part that a colleague from work wanted coated. This part was produced on a inkjet stereolythography printer, and it was a bit gunky from uncleaned process residue. I cleaned it up as best I could, and suspended it above the emitter and ran the cycle. The coating on the chamber top was a bit black this time, but the part, while not as shiny as I would like, turned out okay. I suspect the part was outgassing pretty bad. I will probably bake the next one a bit before I try coating this material again.

Finally, I ran decided to apply an unobstructed coat to the inside of the eight inch bowl that is my chamber top. It is nearly hemispherical and roughly concentric with the emitter, so I figured it would be a pretty good "best case scenario" to test. First, I scrubbed the residue of the past runs out with detergent and scotchbright then reinstalled the bowl. I then ran the coating cycle. After a few seconds at 100% power, the bowl became silvery and opaque to the glow of the emitter basket. I cut power, and examined the coating. The coating was nearly perfect.

My next improvements will be to bore more holes in the chamber wall and add flange fittings to accommodate a high voltage feed-through for plasma cleaning and a port to install a thickness monitor sensor.

I will post a few pics of my setup later.

----- Original Message -----

From: SVC

To: VacuumX@...

Sent: Wednesday, June 23, 2010 3:29 PM

Subject: Re: [VacuumX] Pump manuals

?

If you have a sight window look to see if the oil lever is up to the mark.? If it is that old I would drain and replace the oil.

Make sure the ballast valve is not fully open so you are not just pumping through the valve and not the system. I would start with the valve fully closed and then if you have trouble with water getting in your oil and making it froth up and lose pumping speed you can begin opening he valve is stages. It is best to let in dry air if it is available.

Don

Hi all,

?

I'm new to this group - looks like some of you have some fancy rigs I could only dream of. AnywayI've just dug out a very old Edwards single stage speedi-vac pump, model 1sc50, which has been on the shelf for many years. When I started it up, it did not produce hardly any vacuum ( only an absolute pressure of about 600 mbar, which is useless!!!). Before I start stripping it down, I was wondering if anyone had or could point? me towards a manual? This pump is probably?around 50 years old, but I remember it being refurbished by Edwards around 1975 and it hasn't been used since then.

?

many thanks in anticipation,

?

James

--

____________________________________
Donald M. Mattox
Society of Vacuum Coaters
71 Pinon Hill Place NE
Albuquerque, NM? 87122-1914

Telephone 505/856-7188
FAX 505/856-6716
E-mail donmattox@svc.org
WebSite? http://www.svc.org

----- Original Message -----

From: SVC

To: VacuumX@...

Sent: Wednesday, June 23, 2010 3:29 PM

Subject: Re: [VacuumX] Pump manuals

?

If you have a sight window look to see if the oil lever is up to the mark.? If it is that old I would drain and replace the oil.

Make sure the ballast valve is not fully open so you are not just pumping through the valve and not the system. I would start with the valve fully closed and then if you have trouble with water getting in your oil and making it froth up and lose pumping speed you can begin opening he valve is stages. It is best to let in dry air if it is available.

Don

Hi all,

?

I'm new to this group - looks like some of you have some fancy rigs I could only dream of. AnywayI've just dug out a very old Edwards single stage speedi-vac pump, model 1sc50, which has been on the shelf for many years. When I started it up, it did not produce hardly any vacuum ( only an absolute pressure of about 600 mbar, which is useless!!!). Before I start stripping it down, I was wondering if anyone had or could point? me towards a manual? This pump is probably?around 50 years old, but I remember it being refurbished by Edwards around 1975 and it hasn't been used since then.

?

many thanks in anticipation,

?

James

--

____________________________________
Donald M. Mattox
Society of Vacuum Coaters
71 Pinon Hill Place NE
Albuquerque, NM? 87122-1914

Telephone 505/856-7188
FAX 505/856-6716
E-mail donmattox@svc.org
WebSite? http://www.svc.org

From: Aurigema, Andrew N. (KSC-ASRC-491)[ASRC AEROSPACE] Subject: RE: [VacuumX] Pump manuals
To: "VacuumX@..." <VacuumX@...>
Date: Tuesday, June 22, 2010, 2:20 PM

?

If there is water sitting under the oil it will not do vacuum well either.? Did you drain the oil and put in a fresh charge ???? I have to do that about every 8 hours here is soggy Florida.

?

Drew

?

From: VacuumX@yahoogroups .com [mailto:VacuumX@ yahoogroups. com] On Behalf Of Gomez Addams
Sent: Tuesday, June 22, 2010 2:10 PM
To: VacuumX@yahoogroups .com
Subject: Re: [VacuumX] Pump manuals

?

?

Not to be a jerk or anything, but did you check the oil level?
____________ _________ _________ _________ _
The most fundamental human right is ownership
of your own body. If you may not do with it
however you please, you are not yet free.